KrF (248nm)

GKR series are positive tone KrF photoresist systems that cover a wide range of applications.

  • Non PFOS/PFAS materials
  • High aspect ratio application
  • Superior resistance to plasma etching & ion implantation
  • High thermal stability
  • Wide process windows
  • Low defect levels
  • Long term stability
  • Vertical profiles
  • Wide thickness coverage

GKR series

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